最小流量:0.1SCCM 最大流量:5000SLPM
MC100標準型氣體層流質量流量控制器與SC100標準型氣體層流質量流量控制器的區別在于沒有觸摸式顯示屏,通過產品內置的壓力、溫度傳感器的精確補償及獨創核心算法,在低零點、溫度、壓力漂移量上表現出了杰出性能。堅固的金屬外殼,使產品在工業復雜環境下確保耐用性和強抗電磁干擾性能。內置多種氣體和混氣設置,數字式和模擬式的通訊方式,實現流量的精確測量和控制。
PIPG-MC101-00-0500 | 0.5 SCCM
PIPG-MC101-01-0001 | 1 SCCM
PIPG-MC101-01-0002 | 2 SCCM
PIPG-MC101-01-0005 | 5 SCCM
PIPG-MC101-01-0010 | 10 SCCM
PIPG-MC101-01-0020 | 20 SCCM
PIPG-MC102-01-0050 | 50 SCCM
PIPG-MC102-01-0100 | 100 SCCM
PIPG-MC102-01-0200 | 200 SCCM
PIPG-MC102-01-0500 | 500 SCCM
PIPG-MC102-01-1000 | 1000 SCCM
PIPG-MC102-01-2000 | 2000 SCCM
PIPG-MC120-02-0005 | 5 SLPM
PIPG-MC120-02-0010 | 10 SLPM
PIPG-MC120-02-0020 | 20 SLPM
PIPG-MC120-02-0050 | 50 SLPM
PIPG-MC120-02-0100 | 100 SLPM
PIPG-MC120-02-0200 | 200 SLPM
PIPG-MC150-02-0500 | 500 SLPM
PIPG-MC150-02-1000 | 1000 SLPM
PIPG-MC150-02-1500 | 1500 SLPM
PIPG-MC150-02-2000 | 2000 SLPM
PIPG-MC150-02-3000 | 3000 SLPM
PIPG-MC150-02-4000 | 4000 SLPM
PIPG-MC150-02-5000 | 5000 SLPM
PIPG-MC101-00-0500 | 0.5 SCCM
PIPG-MC101-01-0001 | 1 SCCM
PIPG-MC101-01-0002 | 2 SCCM
PIPG-MC101-01-0005 | 5 SCCM
PIPG-MC101-01-0010 | 10 SCCM
PIPG-MC101-01-0020 | 20 SCCM